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This groundbreaking ebook will give you a finished realizing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical method) resonators. For the 1st time anyplace, you discover wide insurance of those units at either the know-how and alertness degrees. This useful reference provides you with information in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with normal CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their software to sensing and RF platforms. additionally, this one-stop source seems on the major features, modifications, and barriers of FBAR, MEMS, and NEMS units, assisting you to settle on the precise techniques in your tasks. Over 280 illustrations and greater than one hundred thirty equations help key themes in the course of the ebook.
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Additional info for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)
The cantilever is biased to maximize the amplitude of the current. 12) V accounts for both the driving and biasing voltages vAC and VDC, and C includes both the static capacitance C0 and C(x, t). 16) the second term at the right side is dominant, so this equation could be further simplified if needed. Note that the restoring force of the cantilever FX opposes to FE. Along with the dimensions and geometry, it imposes the mechanical conditions for the resonance frequency. 8 show a cantilever placed between the two electrodes, when it resonates at the fundamental and second flexural modes (upper and lower images, respectively).
6, 2006, pp. 153–158. , “Analysis of Vibration Modes in a Micromechanical Square-Plate Resonator,” J. Micromech. , Vol. 19, 2009, 015028. , “Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator,” Proc. IEEE Intl. Conf. MEMS 2006, Istanbul, Turkey, January 22–26, 2006, pp. 78–81. , G. K. Ho, and F. Ayazi, “Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic-Wave Resonators—Part II: Measurement and Characterization,” IEEE Trans. , Vol. 54, 2007, pp. 2024–2030.
54, 2007, pp. 2024–2030. , “An MSI Micromechanical Differential Disk-Array Filter,” Dig. of Tech. Papers 14th Intl. Conf. on Solid-State Sensors, Actuators & Microsystems TRANSDUCERS 2007, Lyon, France, June 10–14, 2007, pp. 307–311. , “Low Phase Noise Array-Composite Micromechanical Wine-Glass Disk Oscillator,” Dig. of Tech. Papers IEEE Intl. , December 5–7, 2005, pp. 281–284.  Demirci, M. , M. A. Abdelmoneum, and C. -C. Nguyen, “Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance,” Dig.